MEMS Achievements by Northwestern Polytechnical Univerisity
By shirly on 2016-03-21

Do you remember the V-outfits inThe Three-body Problemby Liu Xinci? With that Wang Miao could travel in the virtual reality, and everything seems so lifelike. Imagine such kind of things happen to you: you have your personal wearable devices and invite your friends to play kinect games with you; If you are to attend a meeting, you no longer need to carry the bulky notebook with you, for the projector built in the cell phone will project on one of your arms what you need at the conference, so that you will handle your work smoothly; What’s more, you may even have your own private doctor, who would tell you if you have eaten too much for the day, and what health problems you need to be concerned about. And then, the real essence of this “doctor”is merely a chip.

Back in the reality, numerous micro-sensors and micro-actuators play a role in the development, design, navigation, and flight of various modern advanced aircrafts; and in a running car, micro-gyroscopes are working constantly……There is a common “instigator” at the back stage for those seemingly complicated devices---the MEMS sensor. In the eighties of the last century, some scholars had foreseen that the technology with a full name of Micro-Electro Mechanical System would be able to “bring about another technology revolution for human society”. What is even more amazing, it is really very tiny, with the maximal size of no more than one centimeter, and the minimal size of only a few micrometers! Being a key technology concerning the security of national defense, scientific development, and flourishing economy, at present, MEMS has been widely applied in the fields of advanced technology, such as aerospace, electronics, biotechnology, and medicine.

Such magical MEMS technology is right here in Northwestern Plytechnical University!

At School of Mechanical Engineering, the team headed by Prof. Yuan Weizheng has been committed to the development of MEMS. In as early as 2004, Prof. Yuan, considering the demands of the aircraft manufacturing company for J-10 and Chengdu Aircraft Industrial (Group) Co., Ltd, began to develop the system of micro attitude measurement based on MEMS sensor technology, and successfully produced the engineered products for MES attitude measurement and MEMS navigation, realizing the breakthrough from the technical research to engineering application.

According to Prof. Ma Binghe, a member of the team, the MEMS research by NPU mainly targets at the important instruments of the fields of aviation, aerospace, and marine science, which has a feature of high refinement. Take the home made big plane C 919 as an example, MEMS technology is mainly responsible for detecting the frictional drag more accurately so as to make the aircraft cut down the energy consumption. The design of future aircraft will evolve towards intelligentization and flexibility, and both of which will depend on the development of MEMS sensors. Mr. Yuan Guangmin, another member of the team said, “Previous MEMS navigation system had been technically identified together with high-altitude vehicle, marine vehicles, and GPS/ Beidou integrated navigation system. The latest product has resolved the invalidation problem of the system at the moment of high overload, thus achieving a technical breakthrough in the error compensation computing of the system, and which is going to be installed on an UVA for a trial flight.

Compared to the large chromatographic instrument used in hospitals, the micro chromatographic instrument produced by Prof. Chang Honglong has cut down the cost greatly and been directly used to detect the vital signs of the astronauts, thus, contributing a lot to the development of the space flight of our country. And so far, these research achievements have been unique in the world.

Besides, NPU has established the first Micro-system Department in China, and published the only national planned textbook:Micro-Electro Mechanical System. And the innovation works of PU were highly commended by vice Premier Liu Yandong, and Minister Wan Gang of MOST(Ministry of Science and Technology). NPU has obtained some national important special projects and more than 30 national projects, with a total fund of 0.12 billion YMB. NPU has been at an international leading level in MEMS design, flow measurement and control, and smart skin technology.

Exactly as is revealed in the poem that “never to complain about the tiny size of micro-nano, one can make great achievements on this micro stage.” MEMS technology is now ushering in a new technological revolution, making something impossible in the past to become something possible.

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